LASER LIGHT PROVIDES PURE PRECISION

Moving process metrology forward requires precise and reliable diagnostic tools. Given the unique properties and well-defined spatial and spectral characteristics of laser light, it's no surprise that laser sources are playing a key role in advancing metrology techniques.

Examples of lasers featuring strongly in optical metrology include:

  • Novel optical Non-Destructive Testing (NDT) schemes that employ novel THz sources like M Squared's 'Firefly-THz' to sample, image and measure component integrity, e.g. in production line process control.
  • Using deep ultra-violet (DUV) laser wavelengths, like those generated by M Squared's 'ECD-X', for small defect analysis in advanced manufacturing processes, such as semi-conductor patterened wafer inspection.
  • Using femtosecond laser pulses like those generated by M Squared's 'Sprite' to produce either multiphoton- or phonon-based processes, which can be used in precision metrology of nanotechnology-based devices.
  • Mid-IR light from lasers like the M Squared 'Firefly-IR' is enabling a wide range of new gas and chemical based metrology, in which the broad tunability of these sources is being utilised to map out and detect intrinsic IR absorptions to fingerprint process chemicals.

Application advances often demand the development of new laser systems with new performance capabilities. Historically, however, innovation in commercial laser systems has all too often come at the expense of ease of use and reliability, with open-lid product designs that require frequent operator adjustments and maintenance, in marked contrast to the hands-off sources needed for process metrology.

With a 20-year design and applications perspective, M Squared's goal is Dependable Innovation, which describes our commitment to sealed, maintenance-free, automated laser systems that provide next-generation, breakthrough performance, for metrology and myriad other applications.