LASER LIGHT PROVIDES PURE PRECISION
Moving process metrology forward requires precise and reliable
diagnostic tools. Given the unique properties and well-defined
spatial and spectral characteristics of laser light, it's no
surprise that laser sources are playing a key role in advancing
metrology techniques.
Examples of lasers featuring strongly in optical metrology
include:
- Novel optical Non-Destructive Testing (NDT) schemes that employ
novel THz sources like M Squared's 'Firefly-THz' to sample, image and measure
component integrity, e.g. in production line process control.
- Using deep ultra-violet (DUV) laser wavelengths, like those
generated by M Squared's 'ECD-X', for small defect analysis in advanced
manufacturing processes, such as semi-conductor patterened wafer
inspection.
- Using femtosecond laser pulses like those generated by M
Squared's 'Sprite'
to produce either multiphoton- or phonon-based processes, which can
be used in precision metrology of nanotechnology-based
devices.
- Mid-IR light from lasers like the M Squared 'Firefly-IR' is
enabling a wide range of new gas and chemical based metrology, in
which the broad tunability of these sources is being utilised to
map out and detect intrinsic IR absorptions to fingerprint process
chemicals.
Application advances often demand the development of new laser
systems with new performance capabilities. Historically, however,
innovation in commercial laser systems has all too often come at
the expense of ease of use and reliability, with open-lid product
designs that require frequent operator adjustments and maintenance,
in marked contrast to the hands-off sources needed for process
metrology.
With a 20-year design and applications perspective, M Squared's
goal is Dependable Innovation, which describes our commitment to
sealed, maintenance-free, automated laser systems that provide
next-generation, breakthrough performance, for metrology and myriad
other applications.